Semiconductor device having asymmetric fin-shaped pattern

ABSTRACT

Semiconductor devices are provided including a first fin-shaped pattern having first and second sidewalls facing one another and a field insulating film contacting at least a portion of the first fin-shaped pattern. The first fin-shaped pattern includes a lower portion of the first fin-shaped pattern contacting the field insulating film; an upper portion of the first fin-shaped pattern not contacting the field insulating film; a first boundary between the lower portion of the first fin-shaped pattern and the upper portion of the first fin-shaped pattern; and a first fin center line perpendicular to the first boundary and meeting the top of the upper portion of the first fin-shaped pattern. The first sidewall of the upper portion of the first fin-shaped pattern and the second sidewall of the upper portion of the first fin-shaped pattern are asymmetric with respect to the first fin center line.

CROSS REFERENCE TO RELATED APPLICATIONS

This application is a continuation of U.S. patent application Ser. No.15/461,934, filed Mar. 17, 2018, which is a continuation of U.S. patentapplication Ser. No. 14/983,904, filed Dec. 30, 2015 (now U.S. Pat. No.9,601,628), which application claims priority from Korean PatentApplication No. 10-2015-0007315, filed Jan. 15, 2015, and from U.S.Provisional Application No. 62/104,470, filed Jan. 16, 2015, thedisclosures of which are hereby incorporated herein by reference intheir entireties.

FIELD

Embodiments of the present inventive concept relate generally tosemiconductor devices and, more particularly, to multi-gate transistors.

BACKGROUND

Multi-gate transistors use a three-dimensional channel, which can beeasily scaled. The multi-gate transistor can improve its current controlcapability even though its gate length is not increased. In addition,the multi-gate transistor can effectively suppress a short channeleffect (SCE) of the voltage of a channel region being influenced bydrain voltage.

As one of the scaling technologies for increasing the density of asemiconductor device, there has been proposed a multi-gate transistor inwhich a fin-shaped silicon body is formed on a substrate and a gate isfanned on the surface of the silicon body.

SUMMARY

Some embodiments of the inventive concept provide semiconductor deviceswhose performance can be improved by increasing a width effect throughthe adjustment of the shape of a channel of a fin-shaped field effecttransistor (FinFET).

Further embodiments of the present inventive concept provide asemiconductor device comprising, a first fin-shaped pattern including afirst sidewall and a second sidewall facing each other, and a fieldinsulating film contacting a part of the first fin-shaped pattern,wherein the first fin-shaped pattern includes a lower portion of thefirst fin-shaped pattern contacting the field insulating film, an upperportion of the first fin-shaped pattern not contacting the fieldinsulating film, a first boundary between the lower portion of the firstfin-shaped pattern and the upper portion of the first fin-shapedpattern, and a first fin center line perpendicular to the first boundaryand meeting the top of the upper portion of the first fin-shapedpattern, and wherein the first sidewall of the upper portion of thefirst fin-shaped pattern and the second sidewall of the upper portion ofthe first fin-shaped pattern are asymmetric with respect to the firstfin center line.

In still further embodiments of the present inventive concept, in theupper portion of the first fin-shaped pattern of a first distance fromthe first boundary, a slope of the first sidewall is defined by a firstslope, a slope of the second sidewall is defined by a second slope, awidth between the first fin center line and the first sidewall isdefined by a first width, and a width between the first fin center lineand the second sidewall is defined by a second width, and the firstslope and the second slope are different from each other, or the firstwidth and the second width are different from each other.

In some embodiments of the present inventive concept, the first sidewallincludes a first inflection point, and the second sidewall includes asecond inflection point, and a distance from the first boundary to thefirst inflection point is different from a distance from the firstboundary to the second inflection point.

In further embodiments of the present inventive concept, the firstinflection point and the second inflection point are located over anupper surface of the field insulating film

In still further embodiments of the present inventive concept, the firstsidewall of the lower portion of the first fin-shaped pattern and thesecond sidewall of the lower portion of the first fin-shaped pattern areasymmetric with respect to the first fin center line.

In some embodiments of the present inventive concept, the semiconductordevice may further comprise a second fin-shaped pattern which includes athird sidewall and a fourth sidewall facing each other and which isimmediately adjacent to the first fin-shaped pattern, a first trenchwhich is formed between the second sidewall of the first fin-shapedpattern and the third sidewall of the second fin-shaped pattern, thesecond sidewall and the third sidewall facing each other, and a secondtrench which is formed adjacent to the first sidewall of the firstfin-shaped pattern and the fourth sidewall of the second fin-shapedpattern. The field insulating film fills a part of the first trench anda part of the second trench. The second fin-shaped pattern includes alower portion of the second fin-shaped pattern contacting the fieldinsulating film, an upper portion of the second fin-shaped pattern notcontacting the field insulating film, a second boundary between thelower portion of the second fin-shaped pattern and the upper portion ofthe second fin-shaped pattern, and a second fin center lineperpendicular to the second boundary and meeting the top of the upperportion of the second fin-shaped pattern. And the third sidewall of theupper portion of the second fin-shaped pattern and the fourth sidewallof the upper portion of the second fin-shaped pattern are asymmetricwith respect to the second fin center line.

In further embodiments of the present inventive concept, the firsttrench is a trench defining the first fin-shaped pattern and the secondfin-shaped pattern, a first depth of the first trench is smaller than asecond depth of the second trench, a field center line located away fromthe first fin center line and the second fin center line by the samedistance is defined between the first fin center line and the second fincenter line, and the second sidewall of the upper portion of the firstfin-shaped pattern and the third sidewall of the upper portion of thesecond fin-shaped pattern are symmetric with respect to the field centerline.

In still further embodiments of the present inventive concept, thesecond trench defines an active region.

In some embodiments of the present inventive concept, the first trenchis formed at both sides of the second fin-shaped pattern. Thesemiconductor device may further include a third fin-shaped patternwhich is defined by the first trench and which includes a fifth sidewalland a sixth sidewall facing each other between the second fin-shapedpattern and the second trench. The third fin-shaped pattern includes alower portion of the third fin-shaped pattern contacting the fieldinsulating film, an upper portion of the third fin-shaped pattern notcontacting the field insulating film, a third boundary between the lowerportion of the third fin-shaped pattern and the upper portion of thethird fin-shaped pattern, and a third fin center line perpendicular tothe third boundary and meeting the top of the upper portion of the thirdfin-shaped pattern, and the fifth sidewall of the upper portion of thethird fin-shaped pattern and the sixth sidewall of the upper portion ofthe third fin-shaped pattern are asymmetric with respect to the thirdfin center line.

In further embodiments of the present inventive concept, a first depthof the first trench is equal to or smaller than a second depth of thesecond trench, and the first trench and the second trench define anactive region.

In still further embodiments of the present inventive concept, thesemiconductor may further comprise a second fin-shaped pattern includinga third sidewall and a fourth sidewall facing each other. The secondfin-shaped pattern includes a lower portion of the second fin-shapedpattern contacting the field insulating film, an upper portion of thesecond fin-shaped pattern not contacting the field insulating film, asecond boundary between the lower portion of the second fin-shapedpattern and the upper portion of the second fin-shaped pattern, and asecond fin center line perpendicular to the second boundary and meetingthe top of the upper portion of the second fin-shaped pattern, and thethird sidewall of the second fin-shaped pattern and the fourth sidewallof the second fin-shaped pattern are symmetric with respect to thesecond fin center line.

In some embodiments of the present inventive concept, the semiconductormay further comprise a gate electrode to cross the first fin-shapedpattern.

Further embodiments of the present inventive concept provide asemiconductor device comprising, a first trench of a first depth,defining a first fin-shaped pattern, a second trench of a second depthlarger than the first depth, formed at both sides of the firstfin-shaped pattern, and a field insulating film filling a part of thefirst trench and a part of the second trench, wherein the firstfin-shaped pattern includes a lower portion of the first fin-shapedpattern contacting the field insulating film, an upper portion of thefirst fin-shaped pattern not contacting the field insulating film, afirst boundary between the lower portion of the first fin-shaped patternand the upper portion of the first fin-shaped pattern, and a first fincenter line perpendicular to the first boundary and meeting the top ofthe upper portion of the first fin-shaped pattern, and wherein the firstsidewall of the first fin-shaped pattern and the second sidewall of thefirst fin-shaped pattern are asymmetric with respect to the first fincenter line.

In still further embodiments of the present inventive concept, in thefirst fin-shaped pattern of a first distance from the first boundary, aslope of the first sidewall is defined by a first slope, a slope of thesecond sidewall is defined by a second slope, a width between the firstfin center line and the first sidewall is defined by a first width, anda width between the first fin center line and the second sidewall isdefined by a second width. And, the first slope and the second slope aredifferent from each other, or the first width and the second width aredifferent from each other.

In some embodiments of the present inventive concept, the firstfin-shaped pattern of the first distance from the first boundary is theupper portion of the first fin-shaped pattern.

In further embodiments of the present inventive concept, thesemiconductor device may further comprise a second fin-shaped patterndefined by the first trench and disposed between the first fin-shapedpattern and the second trench. The second fin-shaped pattern includes alower portion of the second fin-shaped pattern contacting the fieldinsulating film, an upper portion of the second fin-shaped pattern notcontacting the field insulating film, a second boundary between thelower portion of the second fin-shaped pattern and the upper portion ofthe second fin-shaped pattern, and a second fin center lineperpendicular to the second boundary and meeting the top of the upperportion of the second fin-shaped pattern, and the third sidewall of thesecond fin-shaped pattern and the fourth sidewall of the secondfin-shaped pattern are asymmetric with respect to the second fin centerline.

In still further embodiments of the present inventive concept, thesecond sidewall of the first fin-shaped pattern and the third sidewallof the second fin-shaped pattern face each other with the fieldinsulating film located therebetween, a field center line located awayfrom the first fin center line and the second fin center line by thesame distance is defined between the first fin center line and thesecond fin center line, and the second sidewall of the first fin-shapedpattern and the third sidewall of the second fin-shaped pattern aresymmetric with respect to the field center line.

In some embodiments of the present inventive concept, the semiconductormay further comprise a third fin-shaped pattern defined by the firsttrench between the first fin-shaped pattern and the second fin-shapedpattern.

In further embodiments of the present inventive concept, the secondtrench defines an active region.

In still further embodiments of the present inventive concept, thesemiconductor device may further comprise a gate electrode to cross thefirst fin-shaped pattern.

Some embodiments of the present inventive concept provide asemiconductor device comprising, a first trench of a first depth,defining a first active region and a second active region separated fromeach other, a second trench of a second depth smaller than the firstdepth, defining a first fin-shaped pattern in the first active region, athird trench of a third depth smaller than the first depth, defining asecond fin-shaped pattern and a third fin-shaped pattern in the secondactive region, and a field insulating film filling a part of the firsttrench, a part of the second trench and a part of the third trench,wherein the first fin-shaped pattern includes a lower portion of thefirst fin-shaped pattern contacting the field insulating film, an upperportion of the first fin-shaped pattern not contacting the fieldinsulating film, a first boundary between the lower portion of the firstfin-shaped pattern and the upper portion of the first fin-shapedpattern, and a first fin center line perpendicular to the first boundaryand meeting the top of the upper portion of the first fin-shapedpattern, wherein the second fin-shaped pattern includes a lower portionof the second fin-shaped pattern contacting the field insulating film,an upper portion of the second fin-shaped pattern not contacting thefield insulating film, a second boundary between the lower portion ofthe second fin-shaped pattern and the upper portion of the secondfin-shaped pattern, and a second fin center line perpendicular to thesecond boundary and meeting the top of the upper portion of the secondfin-shaped pattern, wherein a first sidewall of the first fin-shapedpattern and a second sidewall of the first fin-shaped pattern areasymmetric with respect to the first fin center line, and wherein athird sidewall of the second fin-shaped pattern and a fourth sidewall ofthe second fin-shaped pattern are asymmetric with respect to the secondfin center line.

In further embodiments of the present inventive concept, the thirdfin-shaped pattern includes a lower portion of the third fin-shapedpattern contacting the field insulating film, an upper portion of thethird fin-shaped pattern not contacting the field insulating film, athird boundary between the lower portion of the third fin-shaped patternand the upper portion of the third fin-shaped pattern, and a third fincenter line perpendicular to the third boundary and meeting the top ofthe upper portion of the third fin-shaped pattern. And, a fifth sidewallof the third fin-shaped pattern and a sixth sidewall of the thirdfin-shaped pattern are asymmetric with respect to the third fin centerline.

In still further embodiments of the present inventive concept, thesecond fin-shaped pattern and the third fin-shaped pattern areimmediately adjacent to each other, the fourth sidewall of the secondfin-shaped pattern and the fifth sidewall of the third fin-shapedpattern face each other with the field insulating film locatedtherebetween, a field center line located away from the second fincenter line and the third fin center line by the same distance isdefined between the second fin center line and the third fin centerline, and the fourth sidewall of the second fin-shaped pattern and thefifth sidewall of the third fin-shaped pattern are symmetric withrespect to the field center line.

In some embodiments of the present inventive concept, the semiconductordevice may further comprise a fourth fin-shaped pattern and a fifthfin-shaped pattern defined by the second trench. The fourth fin-shapedpattern includes a fourth fin center line, and the fourth fin-shapedpattern is asymmetric with respect to the fourth fin center line.

In further embodiments of the present inventive concept, the fifthfin-shaped pattern includes a fifth fin center line, and the fifthfin-shaped pattern is asymmetric with respect to the fifth fin centerline.

In still further embodiments of the present inventive concept, the firstfin-shaped pattern and the fourth fin-shaped pattern are immediatelyadjacent to each other with the field insulating film locatedtherebetween, a field center line located away from the first fin centerline and the fourth fin center line by the same distance is definedbetween the first fin center line and the fourth fin center line, andthe first fin-shaped pattern and the fourth fin-shaped pattern aresymmetric with respect to the field center line.

BRIEF DESCRIPTION OF THE DRAWINGS

The above and other aspects and features of the present inventiveconcept will become more apparent by describing in detail exemplaryembodiments thereof with reference to the attached drawings, in which:

FIG. 1 is a layout diagram illustrating a semiconductor device accordingto some embodiments of the present inventive concept.

FIG. 2 is a cross section taken along the line A-A′ of FIG. 1.

FIG. 3A is a cross section taken along the line B-B′ of FIG. 1.

FIG. 3B is a diagram of FIG. 3A excluding a first gate electrode.

FIG. 3C is a diagram illustrating a modified example of thesemiconductor device according to some embodiments of the presentinventive concept.

FIG. 4 is a layout diagram illustrating a semiconductor device accordingto some embodiments of the present inventive concept.

FIG. 5 is a cross section taken along the line B-B′ of FIG. 4.

FIG. 6 is a layout diagram for illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept.

FIG. 7 is a cross section taken along the line B-B′ of FIG. 6.

FIG. 8 is a view illustrating a semiconductor device according to someembodiments of the present inventive concept.

FIG. 9 is a view for illustrating a semiconductor device according tosome embodiments of the present inventive concept.

FIG. 10 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept.

FIG. 11 is a cross section taken along the line B-B′ of FIG. 10.

FIG. 12 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept.

FIG. 13 is a cross section taken along the line C-C′ of FIG. 12.

FIG. 14 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept.

FIG. 15 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept.

FIG. 16 is a block diagram of a memory card including the semiconductordevices according to some embodiments of the present inventive concept.

FIG. 17 is a block diagram of an information processing system includingthe semiconductor devices according some embodiments of the presentinventive concept.

FIG. 18 is a block diagram of an electronic appliance including thesemiconductor devices according to some embodiments of the presentinventive concept.

DETAILED DESCRIPTION OF THE EMBODIMENTS

The present inventive concept will now be described more fullyhereinafter with reference to the accompanying drawings, in whichpreferred embodiments of the invention are shown. This invention may,however, be embodied in different forms and should not be construed aslimited to the embodiments set forth herein. Rather, these embodimentsare provided so that this disclosure will be thorough and complete, andwill fully convey the scope of the invention to those skilled in theart. The same reference numbers indicate the same components throughoutthe specification. In the attached figures, the thickness of layers andregions is exaggerated for clarity.

It will be understood that when an element or layer is referred to asbeing “connected to,” or “coupled to” another element or layer, it canbe directly connected to or coupled to another element or layer orintervening elements or layers may be present. In contrast, when anelement is referred to as being “directly connected to” or “directlycoupled to” another element or layer, there are no intervening elementsor layers present. Like numbers refer to like elements throughout. Asused herein, the term “and/or” includes any and all combinations of oneor more of the associated listed items.

It will also be understood that when a layer is referred to as being“on” another layer or substrate, it can be directly on the other layeror substrate, or intervening layers may also be present. In contrast,when an element is referred to as being “directly on” another element,there are no intervening elements present.

It will be understood that, although the terms first, second, etc. maybe used herein to describe various elements, these elements should notbe limited by these terms. These terms are only used to distinguish oneelement from another element. Thus, for example, a first element, afirst component or a first section discussed below could be termed asecond element, a second component or a second section without departingfrom the teachings of the present inventive concept.

The use of the terms “a” and “an” and “the” and similar referents in thecontext of describing the invention (especially in the context of thefollowing claims) are to be construed to cover both the singular and theplural, unless otherwise indicated herein or clearly contradicted bycontext. The terms “comprising,” “having,” “including,” and “containing”are to be construed as open-ended terms (i.e., meaning “including, butnot limited to,”) unless otherwise noted.

Unless defined otherwise, all technical and scientific terms used hereinhave the same meaning as commonly understood by one of ordinary skill inthe art to which this invention belongs. It is noted that the use of anyand all examples, or exemplary terms provided herein is intended merelyto better illuminate the invention and is not a limitation on the scopeof the invention unless otherwise specified. Furthermore, unless definedotherwise, all terms defined in generally used dictionaries may not beoverly interpreted.

Semiconductor device according to some embodiments of the presentinventive concept will be discussed with reference to FIGS. 1 to 3B.FIG. 1 is a layout diagram illustrating a semiconductor device accordingto some embodiment of the present inventive concept. FIG. 2 is a crosssection taken along the line A-A′ of FIG. 1. FIG. 3A is a cross sectiontaken along the line B-B′ of FIG. 1, and FIG. 3B is a view of FIG. 3Aexcluding a first gate electrode.

Referring now to FIGS. 1 to 3A, the semiconductor device 1 according tosome embodiments of the present inventive concept may include a firstfin-shaped pattern 110 and a first gate electrode 210. The firstfin-shaped pattern 110 may be formed in a first active region (ACT1) ofa substrate 100. The first fin-shaped pattern 110 may extend in a firstdirection (X).

The substrate 100, for example, may be a silicon substrate, a bulksilicon substrate, or a silicon-on-insulator (SOD. In some embodiments,the substrate 100 may include an elemental semiconductor such asgermanium, or a compound semiconductor such as a group IV-IV compoundsemiconductor or a group III-V compound semiconductor. Furthermore, thesubstrate 100 may be a substrate in which an epitaxial layer is formedon a base plate.

The group IV-IV compound semiconductor, for example, may be a binarycompound, a ternary compound, a binary compound doped with a group IVelement, or a ternary compound doped with a group IV element, each ofwhich contains at least two of carbon (C), silicon (Si), germanium (Ge),and tin (Sn).

The III-V group compound semiconductor, for example, may be a binarycompound, a ternary compound, or a quaternary compound, each of which isformed by the combination of at least one group III element selectedfrom among aluminum (Al), gallium (Ga) and indium (In) with one group Velement selected from among phosphorus (P), arsenic (As) and antimony(Sb).

In the semiconductor devices according to some embodiments of thepresent inventive concept, the first fin-shaped pattern 110 is describedas a silcon fin-shaped active pattern containing silicon.

In FIG. 1, the first fin-shaped pattern 110 is shown in the form of arectangle; however, embodiments of the present inventive concept are notlimited thereto. When the first fin-shaped pattern 110 has a rectangularform, it may include a long side and a short side.

A field insulating film 105 may be formed on the substrate 100, and maybe disposed around the first fin-shaped pattern 110. The fieldinsulating film 105 may be formed so as to cover a part of the firstfin-shaped pattern 110. The first fin-shaped pattern 110 may be definedby the field insulating film 105.

The field insulating film 105, for example, may be an oxide film, anitride film, an oxynitride film, or a combination thereof.

The first fin-shaped pattern 110 and the field insulating film 105 willbe discussed further below with reference to FIG. 3B.

The first gate electrode 210 may extend in a second direction (Y), andmay be formed so as to cross the first fin-shaped pattern 110. The firstgate electrode 210 may be disposed on the first fin-shaped pattern 110and the field insulating film 105.

The first gate electrode 210 may include metal layers (MG1 and MG2). Asshown in FIGS. 2 and 3A, the first gate electrode 210 may be a laminateof two or more metal layers (MG1 and MG2). In these embodiments, thefirst meal layer (MG1) serves to adjust a work function, and the secondmetal layer (MG2) serves to fill the space fanned by the first metallayer (MG1). The first metal layer (MG1), for example, may include atleast one selected from among TiN, WN, TiAl, TiAlN, TaN, TiC, TaC, TaCN,TaSiN, and combinations thereof, but is not limited thereto. The secondmetal layer (MG2), for example, may include at least one selected fromamong W, Al, Cu, Co, Ti, Ta, poly-Si, SiGe, and metal alloys, but is notlimited thereto. This first gate electrode 210, for example, may beformed by a replacement process (or a gate last process), but is notlimited thereto.

Gate insulating films 115 and 212 may be formed between the firstfin-shaped pattern 110 and the first gate electrode 210. The gateinsulating films 115 and 212 may include an interfacial film 115 and ahigh dielectric insulation film 212.

The interfacial layer 115 can be formed by oxidizing a part of the firstfin-shaped pattern 110. The interfacial layer 115 may be formed alongthe profile of the first fin-shaped pattern 110 protruding over theupper surface of the field insulating film 105. When the firstfin-shaped pattern is a silicon fin-shaped pattern containing silicon,the interfacial layer 115 may include a silicon oxide film.

The high dielectric insulating film 212 may be formed between theinterfacial layer 115 and the first gate electrode 210. The highdielectric insulating film 212 may be formed along the profile of thefirst fin-shaped pattern 110 protruding over the upper surface of thefield insulating film 105. Meanwhile, the high dielectric insulatingfilm 212 may be formed between the first gate electrode 210 and thefield insulating film 105.

The high dielectric insulating film 212, for example, may include atleast one selected from among silicon oxynitride, silicon nitride,hafnium oxide, hafnium silicon oxide, lanthanum oxide, lanthanumaluminum oxide, zirconium oxide, zirconium silicon oxide, tantalumoxide, titanium oxide, barium strontium titanium oxide, barium titaniumoxide, strontium titanium oxide, yttrium oxide, aluminum oxide, leadscandium tantalum oxide, and lead zinc niobate, but is not limitedthereto.

A gate spacer 214 may be disposed on the sidewall of the first gateelectrode 210 extending in the second direction (Y). The gate spacer214, for example, may include at least one selected from among siliconnitride (SiN), silicon oxynitride (SiON), silicon oxide (SiO2), siliconoxycarbonitride (SiOCN), and combinations thereof.

Source/drain 117 may be formed on the first fin-shaped pattern 110 atboth sides of the first gate electrode 210. The source/drain 117 may beformed by an epitaxial process. The source/drain 117, for example, maybe an elevated source/drain.

When the semiconductor device 1 according to some embodiments of thepresent inventive concept is a PMOS transistor, the source/drain 117 mayinclude a compressive stress material. The compressive stress materialmay be a material having a lattice constant larger than that of silicon(Si) and may be, for example, SiGe. The compressive stress material canimprove the mobility of a carrier in a channel region by applyingcompressive stress to the first fin-shaped pattern 110.

In embodiments where the semiconductor device 1 is a NMOS transistor,the source/drain 117 may include a tensile stress material. For example,when the first fin-shaped pattern 110 is a silicon fin-shaped pattern,the source/drain 117 may include a material having a small latticeconstant (for example, SiC). The tensile stress material can improve themobility of a carrier in a channel region by applying tensile stress tothe first fin-shaped pattern 110.

Referring to FIGS. 1 and 3B, the first fin-shaped pattern 110 may bedefined by a first shallow trench (T1) of a first depth, and the firstactive region (ACT1) may be defined by a first deep trench (DT1) of asecond depth larger than the first depth.

In the semiconductor device 1 according to the first embodiment of thepresent inventive concept, the first shallow trench (T1) and the firstdeep trenches (DT1) may be disposed on both sides of the firstfin-shaped pattern 110.

In these embodiments, the first shallow trench (T1) and the first deeptrenches (DT1) may be disposed such that they are immediately adjacentto each other. The first shallow trench (T1) and the first deep trenches(DT1) being immediately adjacent to each other means that anothershallow trench of a first depth is not disposed between the firstshallow trench (T1) and the first deep trenches (DT1).

The field insulating film 105 may be formed so as to fill at least aportion of the first shallow trench (T1) and a part of the first deepshallow (DT1).

The first fin-shaped pattern 110 may include a first sidewall 110 a anda second sidewall 110 b facing each other. The first fin-shaped pattern110 may include an upper portion 112 and a lower portion 111.Furthermore, the first fin-shaped pattern 110 may include a firstboundary 113 between the upper portion 112 of first fin-shaped pattern110 and the lower portion of the first fin-shaped pattern 110.

The field insulating film 105 may contact a part of the first fin-shapedpattern 110. In the first fin-shaped pattern 110, the lower portionthereof 111 may contact the field insulating film 105, and the upperportion thereof 112 may not contact the field insulating film 105.

In other words, the first boundary 113 may be a boundary between thelower portion 111 of the first fin-shaped pattern 110 contacting thefield insulating film 105 and the upper portion 112 of the firstfin-shaped pattern 110 not contacting the field insulating film 105. Thefirst boundary 113 may be a line connecting the points at which thefield insulating film 105 meets the first sidewall 110 a and the secondsidewall 110 b.

Furthermore, the first fin-shaped pattern 110 may include a first fincenter line (FAC1) which is perpendicular to the first boundary 113 andmeets the top of the first fin-shaped pattern 110. In other words, thefirst fin center line (FAC1) can meet the top of the upper portion 112of the first fin-shaped pattern 110.

In these embodiments, the top of the first fin-shaped pattern 110 may bea point at which a line parallel to the first boundary 113 finally meetsthe first fin-shaped pattern 110. Meanwhile, when the top of the firstfin-shaped pattern 110 has a flat surface, the top of the firstfin-shaped pattern 110 may be a mid-point of the flat surface.

In the semiconductor device 1 according to the some embodiments of thepresent inventive concept, the first sidewall 110 a and second sidewall110 b of the first fin-shaped pattern 110 may be asymmetric with respectto the first fin center line (FAC1). The first fin-shaped pattern 110may be asymmetric with respect to the first fin center line (FAC1). Forexample, with respect to the first fin center line (FAC1), the firstsidewall 110 a of the upper portion of 112 of the first fin-shapedpattern 110 and the second sidewall 110 b of the upper portion of 112 ofthe first fin-shaped pattern 110 may be asymmetric.

Furthermore, with respect to the first fin center line (FAC1), the firstsidewall 110 a of the lower portion of 111 of the first fin-shapedpattern 110 and the second sidewall 110 b of the lower portion of 111 ofthe first fin-shaped pattern 110 may be asymmetric; however, embodimentsof the present inventive concept are not limited thereto. In otherwords, the upper portion 112 of the first fin-shaped pattern 110 may beasymmetric, but the lower portion 111 of the first fin-shaped pattern110 may be symmetric.

In these embodiments, with respect to the first fin center line (FAC1),the asymmetry of the first fin-shaped pattern 110 is defined as follows.First, first distance (L), which is a distance from the first boundary113, is defined.

In the first fin-shaped pattern 110 of the first distance (L) from thefirst boundary 113, the slope of the first sidewall 110 a is defined bya first slope (S11), and the slope of the second sidewall 110 b isdefined by a second slope (S12). In the first fin-shaped pattern 110 ofthe first distance (L) from the first boundary 113, when each of thefirst sidewall 110 a and the second sidewall 110 b has a curved surfaceshape, each of the first slope (S11) and the second slope (S12) may be aslope of a tangent. Furthermore, each of the first slope (S11) and thesecond slope (S12) may be an absolute value.

In the first fin-shaped pattern 110 of the first distance (L) from thefirst boundary 113, the width between the first fin center line (FAC1)and the first sidewall 110 a may be defined by a first width (W11), andthe width between the first fin center line (FAC1) and the secondsidewall 110 b may be defined by a second width (W12).

In these embodiments, the first fin-shaped pattern 110 of the firstdistance (L) from the first boundary 113, the slope (S11) of the firstsidewall 110 a may be different from the slope (S12) of the secondsidewall 110 b, or the width (W11) between the first fin center line(FAC1) and the first sidewall 110 a may be different from the width(W12) between the first fin center line (FAC1) and the second sidewall110 b.

In other words, in the first fin-shaped pattern 110 of the firstdistance (L) from the first boundary 113, slope or width may bedifferent, or slope and with may be different.

In FIG. 3B, the first fin-shaped pattern 110 of the first distance (L)from the first boundary 113 has been shown to be the upper portion 112of the first pin-shaped pattern, but is not limited thereto.

Furthermore, the first sidewall 110 a of the first fin-shaped pattern110 may include a first inflection point (p1), and the second sidewall110 b of the first fin-shaped pattern 110 may include a secondinflection point (p2). The distance from the first boundary 113 to thefirst inflection point (p1) may be represented by h1, and the distancefrom the first boundary 113 to the second inflection point (p2) may berepresented by h2.

In the semiconductor device 1 according to some embodiments of thepresent inventive concept, the distance (h1) from the first boundary 113to the first inflection point (p1) may be different from the distance(h2) from the first boundary 113 to the second inflection point (p2).

For example, the first inflection point (p1) of the first sidewall (110a) and the second inflection point (p2) of the second sidewall (110 b )may be included in the upper portion 112 of the first fin-shaped pattern112. In other words, the first inflection point (p1) of the firstsidewall (110 a) and the second inflection point (p2) of the secondsidewall (110 b ) may be located over the upper surface of the fieldinsulating film 105.

Referring now to FIG. 3C, a diagram illustrating a modified example ofthe semiconductor device according to some embodiments of the presentinventive concept will be discussed. For the convenience of explanation,the modified example thereof will be described focusing on thedifferences between the embodiments discussed above and embodiments ofFIG. 3C, thus, details discussed above will not be repeated herein inthe interest of brevity.

As illustrated in FIG. 3C, the modified example (1 a) of thesemiconductor device according to some embodiments of the presentinventive concept may further include a protrusion structure (PRT). Theprotrusion structure (PRT) may be formed by the protrusion of the bottomof the first shallow trench (T1), and is formed such that it may belocated under the upper surface of the field insulating film 105. Theprotrusion structure (PRT) may be located at the boundary of the firstshallow trench (T1) and the first deep trench (DT1).

In FIG. 3C, the protrusion structure (PRT) is formed at one side of thefirst fin-shaped pattern 110, however, it will be understood thatembodiments of the present inventive concept are not limited thereto. Inother words, the protrusion structures (PRTs) may also be formed at bothsides of the first fin-shaped pattern 110 without departing from thescope of the present inventive concept.

FIG. 4 is a layout diagram illustrating a semiconductor device accordingto some embodiments of the present inventive concept. FIG. 5 is a crosssection taken along the line B-B′ of FIG. 4. For the convenience ofexplanation, the semiconductor device of FIGS. 4 and 5 will be discussedfocusing on the differences between embodiments discussed above andembodiments illustrated in FIGS. 4 and 5. FIG. 5 illustrates fin-shapedpatterns and a field insulating film excluding a first gate electrode.

Referring now to FIGS. 4 and 5, the semiconductor device 2 according tosome embodiments of the present inventive concept may further include asecond fin-shaped pattern 120. The second fin-shaped pattern 120 isformed immediately adjacent to the first fin-shaped pattern 110.

The second fin-shaped pattern 120 may be formed in the first activeregion (ACT1) of the substrate 100. The second fin-shaped pattern 120may extend in the first direction (X). The field insulation film 105 maycontact a part of the second fin-shaped pattern 120.

The second fin-shaped pattern 120 may be defined by the first shallowtrench (T1) of a first depth. The first shallow trench (T1) is disposedbetween the first fin-shaped pattern 110 and the second fin-shapedpattern 120 to separate the first fin-shaped pattern 110 and the secondfin-shaped pattern 120. The first shallow trenches (T1) may be disposedboth sides of the second fin-shaped pattern 120.

The second fin-shaped pattern 120 may include a third sidewall 120 a anda fourth sidewall 120 b facing each other. The second fin-shaped pattern120 may include an upper portion 122 and a lower portion 121.Furthermore, the second fin-shaped pattern 120 may include a secondboundary 123 between the upper portion 122 of the second fin-shapedpattern 120 and the lower portion 121 of the second fin-shaped pattern120.

The first shallow trench (T1) separating the first fin-shaped pattern110 and the second fin-shaped pattern 120 may be disposed between thesecond sidewall 110 b of the first fin-shaped pattern 110 and the thirdsidewall 120 a of the second fin-shaped pattern 120. The first deeptrenches (DT1) defining the first active region (ACT1) may be formed tobe respectively adjacent to the first sidewall 110 a of the firstfin-shaped pattern 110 and the fourth sidewall 120 b of the secondfin-shaped pattern 120.

The field insulating film 105 may contact a part of the secondfin-shaped pattern 120. In the second fin-shaped pattern 120, the lowerportion thereof 121 may contact the field insulating film 105, and theupper portion thereof 122 may not contact the field insulating film 105.

Furthermore, the second fin-shaped pattern 120 may include a second fincenter line (FAC2) which is perpendicular to the second boundary 123 andmeets the top of the second fin-shaped pattern 120. In other words, thesecond fin center line (FAC2) may meet the top of the upper portion 122of the second fin-shaped pattern 120.

In the semiconductor device 2 according to some embodiments of thepresent inventive concept, the first sidewall 110 a and second sidewall110 b of the first fin-shaped pattern 110 may be asymmetric with respectto the first fin center line (FAC1), and the third sidewall 120 a andfourth sidewall 120 b of the second fin-shaped pattern 120 may beasymmetric with respect to the second fin center line (FAC2).

For example, with respect to the second fin center line (FAC2), thethird sidewall 120a of the upper portion of 122 of the second fin-shapedpattern 120 and the fourth sidewall 120 b of the upper portion of 122 ofthe second fin-shaped pattern 120 may be asymmetric.

In the second fin-shaped pattern 120 of the first distance (L) from thesecond boundary 123, the slope of the third sidewall 120 a is defined bya third slope (S21), and the slope of the fourth sidewall 120 b isdefined by a fourth slope (S22). Furthermore, in the second fin-shapedpattern 120 of the first distance (L) from the second boundary 123, thewidth between the second fin center line (FAC2) and the third sidewall120 a is defined by a third width (W21), and the width between thesecond fin center line (FAC2) and the fourth sidewall 120 b is definedby a fourth width (W22).

In these embodiments, in the second fin-shaped pattern 120 of the firstdistance (L) from the second boundary 123, the slope (S21) of the thirdsidewall 120 a may be different from the slope (S22) of the fourthsidewall 120 b, or the width (W21) between the second fin center line(FAC2) and the third sidewall 120 a may be different from the width(W22) between the second fin center line (FAC2) and the fourth sidewall120 b.

Furthermore, a first field center line (FOC1) located away from thefirst fin center line (FAC1) and the second fin center line (FAC2) bythe same distance may be defined between the first fin center line(FAC1) and the second fin center line (FAC2).

In the semiconductor device 2 according to some embodiments of thepresent inventive concept, the first fin-shaped pattern 110 and thesecond fin-shaped pattern 120 may be symmetric with respect to the firstfield center line (FOCI). With respect to the first field center line(FOC1), the second sidewall 110 b of the first fin-shaped pattern 110and the third sidewall 120 a of the second fin-shaped pattern 120 may besymmetric, and the first sidewall 110 a of the first fin-shaped pattern110 and the fourth sidewall 120 b of the second fin-shaped pattern 120may be symmetric.

For example, the slope (S21) of the third sidewall 120 a may besubstantially equal to the slope (S12) of the second sidewall 110 b, andthe slope (S22) of the fourth sidewall 120 b may be substantially equalto the slope (S11) of the first sidewall 110 a. Furthermore, the width(W11) between the first fin center line (FAC1) and the first sidewall110 a may be substantially equal to the width (W22) between the secondfin center line (FAC2) and the fourth sidewall 120 b, and the width(W12) between the first fin center line (FAC1) and the second sidewall110 b may be substantially equal to the width (W21) between the secondfin center line (FAC2) and the third sidewall 120 a.

FIG. 6 is a layout diagram illustrating a semiconductor device accordingto some embodiments of the present inventive concept. FIG. 7 is a crosssection taken along the line B-B′ of FIG. 6. For the convenience ofexplanation, the semiconductor device according to some embodiments ofthe present inventive concept illustrated in FIGS. 6 and 7 will bediscussed focusing on the differences between the embodiments discussedabove and embodiments illustrated in FIGS. 6 and 7. FIG. 7 illustratesfin-shaped patterns and a field insulating film excluding a first gateelectrode.

Referring to FIGS. 6 and 7, the semiconductor device 3 according to someembodiments of the present inventive concept may further include a thirdfin-shaped pattern 130. The third fin-shaped pattern 130 may be formedbetween the second fin-shaped pattern 120 and the first deep trench(DT1).

The third fin-shaped pattern 130 may be formed in the first activeregion (ACT1) of the substrate 100. The third fin-shaped pattern 130 mayextend in the first direction (X). The field insulation film 105 maycontact a part of the third fin-shaped pattern 130.

The third fin-shaped pattern 130 may be defined by the first shallowtrench (T1) of a first depth. The first shallow trench (T1) is disposedbetween the second fin-shaped pattern 120 and the third fin-shapedpattern 130 to separate the second fin-shaped pattern 120 and the thirdfin-shaped pattern 120. The first shallow trenches (T1) may be disposedon both sides of the third fin-shaped pattern 130.

The third fin-shaped pattern 130 may include a fifth sidewall 130 a anda sixth sidewall 130 b facing each other. The third fin-shaped pattern130 may include an upper portion 132 and a lower portion 131.Furthermore, the third fin-shaped pattern 130 may include a thirdboundary 133 between the upper portion 132 of the third fin-shapedpattern 130 and the lower portion 131 of the third fin-shaped pattern130.

In the third fin-shaped pattern 130, the lower portion thereof 131 maycontact the field insulating film 105, and the upper portion thereof 132may not contact the field insulating film 105.

Furthermore, the third fin-shaped pattern 130 may include a third fincenter line (FAC3) which is perpendicular to the third boundary 133 andmeets the top of the third fin-shaped pattern 130. In other words, thethird fin center line (FAC3) may meet the top of the upper portion 132of the third fin-shaped pattern 130.

In the semiconductor device 3 according to the some embodiments of thepresent inventive concept, the fifth sidewall 130 a and sixth sidewall130 b of the third fin-shaped pattern 130 may be asymmetric with respectto the third fin center line (FAC3). For example, with respect to thethird fin center line (FAC3), the fifth sidewall 130 a of the upperportion of 132 of the third fin-shaped pattern 130 and the sixthsidewall 130 b of the upper portion of 132 of the second fin-shapedpattern 130 may be asymmetric.

Furthermore, a second field center line (FOC2) located away from thesecond fin center line (FAC2) and the third fin center line (FAC3) bythe same distance may be defined between the second fin center line(FAC2) and the third fin center line (FAC3).

In the semiconductor device 3 according to some embodiments of thepresent inventive concept, the second fin-shaped pattern 120 and thethird fin-shaped pattern 130 may be symmetric with respect to the secondfield center line (FOC2). With respect to the second field center line(FOC2), the fourth sidewall 120 b of the second fin-shaped pattern 120and the fifth sidewall 130 a of the third fin-shaped pattern 130 may besymmetric, and the third sidewall 120 a of the second fin-shaped pattern120 and the sixth sidewall 130 b of the third fin-shaped pattern 130 maybe symmetric.

Referring now to FIG. 8, a diagram illustrating s semiconductor deviceaccording to some embodiments of the present inventive concept will bediscussed. For the convenience of explanation, the semiconductor deviceaccording embodiments illustrated in FIG. 8 will be discussed focusingon the differences between embodiments discussed above and embodimentsillustrated in FIG. 8.

Referring now to FIG. 8, in the semiconductor device 4 according to someembodiments of the present inventive concept, the third fin-shapedpattern 130 may be symmetric with respect to the third fin center line(FAC3).

In particular, with respect to the third fin center line (FAC3), thefifth sidewall 130 a of the third fin-shaped pattern 130 and the sixthsidewall 130 b of the third fin-shaped pattern 130 may be symmetric toeach other. Thus, the second fin-shaped pattern 120 and the thirdfin-shaped pattern 130 may be asymmetric.

Unlike that shown in FIG. 8, the third fin-shaped pattern 130 which issymmetric with respect to the third fin center line (FAC3) may be formedin another active region, not the first active region (ACT1).

FIG. 9 is a diagram illustrating a semiconductor device according tosome embodiments of the present inventive concept. For the convenienceof explanation, the semiconductor device illustrated in FIG. 9 will bediscussed focusing on the differences between embodiments discussedabove and embodiments illustrated in FIG. 9.

Referring to FIG. 9, in the semiconductor device 5 according to someembodiments of the present inventive concept, the third fin-shapedpattern 130 may be disposed between the first fin-shaped pattern 110 andthe second fin-shaped pattern 120. The third fin-shaped pattern 130 maybe symmetric with respect to the third fin center line (FAC3).

Furthermore, the first field center line (FOC1) located away from thefirst fin center line (FAC1) and the second fin center line (FAC2) bythe same distance between the first fin center line (FAC1) and thesecond fin center line (FAC2) may be defined in the third fin-shapedpattern 130.

In FIG. 9, the third fin-shaped pattern 130 and the first field centerline (FOC1) have been shown to be defined at the same position; however,embodiments of the present inventive concept are not limited to thisconfiguration.

FIG. 10 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept. FIG. 11is a cross section taken along the line B-B′ of FIG. 10. For theconvenience of explanation, the semiconductor device illustrated in FIG.10 will be discussed focusing on the differences between embodimentsdiscussed above and embodiments illustrated in FIG. 10. FIG. 11illustrates fin-shaped patterns and a field insulating film excluding afirst gate electrode.

Referring to FIGS. 10 and 11, in the semiconductor device 6 according tothe sixth embodiment of the present inventive concept, the firstfin-shaped pattern 110 may be formed in a first active region (ACT1),and the second fin-shaped pattern 120 may be formed in a second activeregion (ACT2).

Each of the first fin-shaped pattern 110 and the second fin-shapedpattern 120 may be defined by the first shallow trench (T1) of a firstdepth.

However, the first active region (ACT1) and the second active region(ACT2) may be defined by the first deep trench (DTI) of a second depthand the second deep trench (DT2) of a third depth. The first activeregion (ACT1) and the second active region (ACT2) may be separated bythe second deep trench (DT2) of a third depth.

In other words, the second deep trench (DT2) of a third depth is locatedbetween the second sidewall 110 b of the first fin-shaped pattern 110and the third sidewall 120 a of the second fin-shaped pattern 120. Thefirst deep trenches (DT1) of a second depth are formed adjacent to thefirst sidewall 110 a of the first fin-shaped pattern 110 and the fourthsidewall 120 b of the second fin-shaped pattern 120.

In the semiconductor device 6 according to some embodiments of thepresent inventive concept, the second depth of the first deep trench(DT1) may be equal to or larger than the third depth of the second deeptrench (DT2).

Due to the loading effect of the first fin-shaped pattern 110 and thesecond fin-shaped pattern 120, the third depth of the second deep trench(DT2) may be smaller than the second depth of the first deep trench(DT1).

In the semiconductor device 6 according to some embodiments of thepresent inventive concept, the first sidewall 110 a and second sidewall110 b of the first fin-shaped pattern 110 may be asymmetric with respectto the first fin center line (FAC1), and the third sidewall 120 a andfourth sidewall 120 b of the second fin-shaped pattern 120 may beasymmetric with respect to the second fin center line (FAC2).

As illustrated in FIG. 11, the first fin-shaped pattern 110 and thesecond fin-shaped pattern 120 have been shown to be symmetric withrespect to the second deep trench (DT2), but this is only forconvenience of explanation, and is not limited thereto.

FIG. 12 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept. FIG. 13is a cross section taken along the line C-C′ of FIG. 12. For theconvenience of explanation, the semiconductor device illustrated in FIG.12 will be discussed focusing on the differences between embodimentsdiscussed above and embodiments illustrated in FIG. 12. FIG. 13illustrates fin-shaped patterns and a field insulating film excluding afirst gate electrode and a second gate electrode.

Referring to FIGS. 12 and 13, the first active region (ACT1) and thethird active region (ACT3), which are spaces apart from each other, maybe defined by the first deep trench (DT1).

The first fin-shaped pattern 110 may be formed in the first activeregion (ACT1) of the substrate 100, and the fourth fin-shaped pattern140 and the fifth fin-shaped pattern 150 may be formed in the thirdactive region (ACT3) of the substrate 100. The fourth fin-shaped pattern140 and the fifth fin-shaped pattern 150 may be immediately adjacent toeach other.

The first fin-shaped pattern 110 may be defined by the first shallowtrench (T1) of a first depth which is smaller than the depth of thefirst deep trench (DT1).

The fourth fin-shaped pattern 140 and the fifth fin-shaped pattern 150may be defined by the second shallow trench (T2) of a fourth depth whichis smaller than the depth of the first deep trench (DT1). The secondshallow trench (T2) is disposed between the fourth fin-shaped pattern140 and the fifth fin-shaped pattern 150 to separate the fourthfin-shaped pattern 140 and the fifth fin-shaped pattern 150.

The filed insulating film 105 may be formed so as to fill at least aportion of the first shallow trench (T1), a part of the second shallowtrench (T2) and a part of the first deep trench (DT1).

The first gate electrode 210 may extend in the second direction (Y) tocross the first fin-shaped pattern 110, and the second gate electrode220 may extend in the second direction (Y) to cross the fourthfin-shaped pattern 140 and the fifth fin-shaped pattern 150.

The description of the second gate electrode 220 is substantially thesame as that of the first gate electrode 210. Therefore, the descriptionof the second gate electrode 220 will be omitted in the interest ofbrevity.

Unlike that shown in FIG. 12, the first gate electrode 210 and thesecond gate electrode 220 may connected with each other.

The fourth fin-shaped pattern 140 may include a seventh sidewall 140 aand an eighth sidewall 140 b facing each other. The fourth fin-shapedpattern 140 may include an upper portion 142 not contacting the fieldinsulating film 105 and a lower portion 141 contacting the fieldinsulating film 105. The fourth fin-shaped pattern 140 may include afourth boundary 143 between the upper portion 142 of the fourthfin-shaped pattern 140 and the lower portion 141 of the fourthfin-shaped pattern 140. Furthermore, the fourth fin-shaped pattern 140may include a fourth fin center line (FAC4) which is perpendicular tothe fourth boundary 143 and meets the top of the fourth fin-shapedpattern 140.

The fifth fin-shaped pattern 150 may include a ninth sidewall 150 a anda tenth sidewall 150 b facing each other. The fifth fin-shaped pattern150 may include an upper portion 152 not contacting the field insulatingfilm 105 and a lower portion 151 contacting the field insulating film105. The fifth fin-shaped pattern 150 may include a fifth boundary 153between the upper portion 152 of the fifth fin-shaped pattern 150 andthe lower portion 151 of the fifth fin-shaped pattern 150. Furthermore,the fifth fin-shaped pattern 150 may include a fifth fin center line(FAC5) which is perpendicular to the fifth boundary 153 and meets thetop of the fifth fin-shaped pattern 150.

In the semiconductor device 7 according to some embodiments of thepresent inventive concept, the seventh sidewall 140 a and eighthsidewall 140 b of the fourth fin-shaped pattern 140 may be asymmetricwith respect to the fourth fin center line (FAC4), and the ninthsidewall 150 a and tenth sidewall 150 b of the fifth fin-shaped pattern150 may be asymmetric with respect to the fifth fin center line (FAC5).

For example, with respect to the fourth fin center line (FAC4), theseventh sidewall 140 a of the upper portion of 142 of the fourthfin-shaped pattern 140 and the eighth sidewall 140 b of the upperportion of 142 of the fourth fin-shaped pattern 140 may be asymmetric,and, with respect to the fifth fin center line (FAC5), the ninthsidewall 150 a of the upper portion of 152 of the fifth fin-shapedpattern 150 and the tenth sidewall 150 b of the upper portion of 152 ofthe fifth fin-shaped pattern 150 may be asymmetric.

Furthermore, a third field center line (FOC3) located away from thefourth fin center line (FAC4) and the fifth fin center line (FAC5) bythe same distance may be defined between the fourth fin center line(FAC4) and the fifth fin center line (FAC5).

In the semiconductor device 7 according to some embodiments of thepresent inventive concept, the fourth fin-shaped pattern 140 and thefifth fin-shaped pattern 150 may be symmetric with respect to the thirdfield center line (FOC3). With respect to the third field center line(FOC3), the eighth sidewall 140 b of the fourth fin-shaped pattern 140and the ninth sidewall 150 a of the fifth fin-shaped pattern 150 may besymmetric, and the seventh sidewall 140 a of the fourth fin-shapedpattern 140 and the tenth sidewall 150 b of the fifth fin-shaped pattern150 may be symmetric.

FIG. 14 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept. For theconvenience of explanation, the semiconductor device illustrated in FIG.14 will be discussed focusing on the differences between embodimentsdiscussed above and embodiments illustrated in FIG. 14. In the crosssection taken along the line C-C′ of FIG. 14, the third active region(ACT3) may be similar to any one of those of FIGS. 7 to 9.

Referring to FIG. 14, the semiconductor device 8 according to someembodiments of the present inventive concept may further include a sixthfin-shaped pattern 160 formed in the third active region (ACT3) of thesubstrate 100.

The sixth fin-shaped pattern 160 may extend in the first direction (X).The fourth fin-shaped pattern 140, the fifth fin-shaped pattern 150, andthe sixth fin-shaped pattern 160 may be sequentially formed in thesecond direction (Y).

Like the fourth fin-shaped pattern 140 and the fifth fin-shaped pattern150, the sixth fin-shaped pattern 160 may be asymmetric; however,embodiments of the present inventive concept are not limited thereto.Like the third fin-shaped pattern 130 in FIG. 8, the sixth fin-shapedpattern 160 may also be symmetric.

Unlike that shown in FIG. 14, the sixth fin-shaped pattern 160 may alsobe disposed between the fourth fin-shaped pattern 140 and the fifthfin-shaped pattern 150.

FIG. 15 is a layout diagram illustrating a semiconductor deviceaccording to some embodiments of the present inventive concept. For theconvenience of explanation, the semiconductor device illustrated in FIG.15 will be discussed focusing on the differences between embodimentsdiscussed above and embodiments illustrated in FIG. 15. In the crosssection taken along the line C-C′ of FIG. 15, the first active region(ACT1) may be similar to any one of those of FIGS. 7 to 9.

Referring to FIG. 15, the semiconductor device 9 according to someembodiments of the present inventive concept may further include asecond fin-shaped pattern 120 and a third fin-shaped pattern 130 formedin the first active region (ACT1) of the substrate 100. The secondfin-shaped pattern 120 may be immediately adjacent to the firstfin-shaped pattern 110.

The second fin-shaped pattern 120 may be asymmetric with respect to thesecond fin center line (FAC2). In other words, the third sidewall 120 aand fourth sidewall 120 b of the second fin-shaped pattern 120 may beasymmetric with respect to the second fin center line (FAC2).

Furthermore, the first fin-shaped pattern 110 and the second fin-shapedpattern 120 may be symmetric with respect to the first field center line(FOC1).

When the cross section taken along the line C-C′ of FIG. 15 is the sameas FIG. 7, the third fin-shaped pattern 130 may be asymmetric withrespect to the third fine center line (FAC3).

Unlike this, when the cross section taken along the line C-C′ of FIG. 15is the same as FIG. 8, the third fin-shaped pattern 130 may be symmetricwith respect to the third fine center line (FAC3).

Referring now to FIG. 16, a block diagram illustrating a memory cardincluding semiconductor devices according to some embodiments of thepresent inventive concept will be discussed. As illustrated in FIG. 16,memory 1210 including the semiconductor devices according to someembodiments of the present inventive concept can be used in the memorycard 1200. The memory card 1200 may further include a memory controller1220 for controlling the data exchange between a host 1230 and thememory 1210. SRAM 1221 can be used as the operation memory of a centralprocessing unit (CPU) 1222. A host interface 1223 may include a protocolfor exchanging data by connecting the host 1230 with the memory card1200. An error correction code 1224 serves to detect and correct theerrors read from the memory 1210. A memory interface 1225 serves tointerface with the memory 1210. The central processing unit (CPU) 1222serves to perform the overall control operation associated with the dataexchange of the memory controller 1220.

Referring now to FIG. 17, a block diagram of an information processingsystem including semiconductor devices according to some embodiments ofthe present inventive concept will be discussed. As illustrated in FIG.17, the information processing system 1300 may further include a memorysystem 1310 including the semiconductor devices according to someembodiments of the present inventive concept. The information processingsystem 1300 may include the memory system 1310, a modem 1320, a centralprocessing unit (CPU) 1330, RAM 1340, and a user interface 1350, each ofwhich is electrically connected with a system bus 1360. The memorysystem 1310 may include memory 1311 and a memory controller 1312, andmay have substantially the same configuration as the memory card shownin FIG. 16. Data processed by the central processing unit (CPU) 1330 ordata received from external devices may be stored in the memory system1310. The information processing system 1300 can be applied to memorycards; SSDs, camera image sensors, and other various chip sets. Forexample, the memory system 1310 may be configured to employ SSD, and, inthis case, the information processing system 1300 can stably andreliably process a large amount of data.

Referring now to FIG. 18, a block diagram of an electronic applianceincluding semiconductor devices according to some embodiments of thepresent inventive concept will be discussed. As illustrated in FIG. 18,the electronic appliance 1400 may include the semiconductor devicesaccording to some embodiments of the present inventive concept. Theelectronic appliance 1400 can be used in wireless communicationapparatuses, for example, PDAs, notebook computers, portable computers,web tablets, wireless telephones, and wireless digital music players, orvarious apparatuses for communicating information in a wirelesscommunication environment.

The electronic appliance 1400 may include a controller 1410, aninput/out (I/O) unit 1420, memory 1430, and a wireless interface 1440.In these embodiments, the memory 1430 may include the semiconductordevices according to the embodiments of the present inventive concept.The controller 1410 may include a microprocessor, a digital signalprocessor, or a processor similar thereto. The memory 1430 can be usedin storing the commands (or user data) processed by the controller 1410.The wireless interface 1440 can be used in communicating data through awireless data network. The wireless interface 1440 may include anantenna and/or a wireless transceiver. The electronic appliance 1400 canuse third-generation communication system protocols, such as CDMA, GSM,NADC, E-TDMA, WCDMA, and CDMA2000.

While the present inventive concept has been particularly shown anddescribed with reference to exemplary embodiments thereof, it will beunderstood by those of ordinary skill in the art that various changes inform and details may be made therein without departing from the spiritand scope of the present inventive concept as defined by the followingclaims. It is therefore desired that the present embodiments beconsidered in all respects as illustrative and not restrictive,reference being made to the appended claims rather than the foregoingdescription to indicate the scope of the invention.

1-20. (canceled)
 21. A semiconductor device, comprising: a first finpattern including first and second sidewalls opposite one another; asecond fin pattern including third and fourth sidewalls opposite oneanother; a third fin pattern between the first fin pattern and thesecond fin pattern; and a field insulating film contacting at least aportion of the first fin pattern, at least a portion of the second finpattern and at least a portion of the third fin pattern, wherein thefirst fin pattern comprises: a lower portion of the first fin patterncontacting the field insulating film; an upper portion of the first finpattern not contacting the field insulating film; a first boundarybetween the lower portion of the first fin pattern and the upper portionof the first fin pattern; and a first fin center line perpendicular tothe first boundary and meeting a top of the upper portion of the firstfin pattern, wherein the second fin pattern comprises: a lower portionof the second fin pattern contacting the field insulating film; an upperportion of the second fin pattern not contacting the field insulatingfilm; a second boundary between the lower portion of the second finpattern and the upper portion of the second fin pattern; and a secondfin center line perpendicular to the second boundary and meeting a topof the upper portion of the second fin pattern, wherein the firstsidewall of the upper portion of the first fin pattern and the secondsidewall of the upper portion of the first fin pattern are asymmetricwith respect to the first fin center line, and wherein the thirdsidewall of the upper portion of the second fin pattern and the fourthsidewall of the upper portion of the second fin pattern are asymmetricwith respect to the second fin center line.
 22. The semiconductor deviceof claim 21: wherein, in the upper portion of the first fin patternhaving a first distance from the first boundary, a slope of the firstsidewall is defined by a first slope, a slope of the second sidewall isdefined by a second slope, a width between the first fin center line andthe first sidewall is defined by a first width, and a width between thefirst fin center line and the second sidewall is defined by a secondwidth, and wherein the first slope and the second slope are differentfrom each other, or the first width and the second width are differentfrom each other.
 23. The semiconductor device of claim 22, wherein thefirst slope and the second slope are different from each other, and thefirst width and the second width are different from each other.
 24. Thesemiconductor device of claim 21, wherein the first sidewall of thelower portion of the first fin pattern and the second sidewall of thelower portion of the first fin pattern are asymmetric with respect tothe first fin center line.
 25. The semiconductor device of claim 21,wherein the third fin pattern comprises: a lower portion of the thirdfin pattern contacting the field insulating film; an upper portion ofthe third fin pattern not contacting the field insulating film; a thirdboundary between the lower portion of the third fin pattern and theupper portion of the third fin pattern; and a third fin center lineperpendicular to the third boundary and meeting a top of the upperportion of the third fin pattern, and wherein a fifth sidewall of thethird fin pattern and a sixth sidewall of the third fin pattern areasymmetric with respect to the third fin center line.
 26. Thesemiconductor device of claim 25, the fifth sidewall of the upperportion of the third fin pattern and the sixth sidewall of the upperportion of the third fin pattern are asymmetric with respect to thethird fin center line.
 27. The semiconductor device of claim 25: whereinthe second fin pattern and the third fin pattern are immediatelyadjacent to one another, wherein a field center line located away fromthe second fin center line and the third fin center line by a samedistance is defined between the second fin center line and the third fincenter line, and wherein the fourth sidewall of the second fin patternand the fifth sidewall of the third fin pattern are symmetric withrespect to the field center line.
 28. The semiconductor device of claim21, wherein the third fin pattern comprises: a lower portion of thethird fin pattern contacting the field insulating film; an upper portionof the third fin pattern not contacting the field insulating film; athird boundary between the lower portion of the third fin pattern andthe upper portion of the third fin pattern; and a third fin center lineperpendicular to the third boundary and meeting a top of the upperportion of the third fin pattern, and wherein a fifth sidewall of thethird fin pattern and a sixth sidewall of the third fin pattern aresymmetric with respect to the third fin center line.
 29. Thesemiconductor device of claim 21: wherein in the lower portion of thefirst fin pattern having a first distance from the first boundary, aslope of the first sidewall is defined by a first slope, a slope of thesecond sidewall is defined by a second slope, a width between the firstfin center line and the first sidewall is defined by a first width, anda width between the first fin center line and the second sidewall isdefined by a second width, and wherein the first slope is substantiallythe same as the second slope, and the first width is substantially thesame as the second width.
 30. The semiconductor device of claim 21,further comprising a gate electrode crossing at least one the firstthrough third fin pattern.
 31. A semiconductor device, comprising: afirst fin pattern including first and second sidewalls opposite oneanother; a second fin pattern including third and fourth sidewallsopposite one another; a third fin pattern between the first fin patternand the second fin pattern; and a field insulating film contacting atleast a portion of the first fin pattern, at least a portion of thesecond fin pattern and at least a portion of the third fin pattern,wherein the first fin pattern comprises: a lower portion of the firstfin pattern contacting the field insulating film; an upper portion ofthe first fin pattern not contacting the field insulating film; a firstboundary between the lower portion of the first fin pattern and theupper portion of the first fin pattern; and a first fin center lineperpendicular to the first boundary and meeting a top of the upperportion of the first fin pattern, wherein the second fin patterncomprises: a lower portion of the second fin pattern contacting thefield insulating film; an upper portion of the second fin pattern notcontacting the field insulating film; a second boundary between thelower portion of the second fin pattern and the upper portion of thesecond fin pattern; and a second fin center line perpendicular to thesecond boundary and meeting a top of the upper portion of the second finpattern, wherein the third fin pattern comprises: a lower portion of thethird fin pattern contacting the field insulating film; an upper portionof the third fin pattern not contacting the field insulating film; athird boundary between the lower portion of the third fin pattern andthe upper portion of the third fin pattern; and a third fin center lineperpendicular to the third boundary and meeting a top of the upperportion of the third fin pattern, wherein the first sidewall of theupper portion of the first fin pattern and the second sidewall of theupper portion of the first fin pattern are substantially asymmetric withrespect to the first fin center line, wherein the third sidewall of theupper portion of the second fin pattern and the fourth sidewall of theupper portion of the second fin pattern are substantially asymmetricwith respect to the second fin center line, and wherein a fifth sidewallof the third fin pattern and a sixth sidewall of the third fin patternare substantially symmetric with respect to the third fin center line.32. A semiconductor device, comprising: a first fin-shaped patternincluding first and second sidewalls opposite one another; and a fieldinsulating film contacting at least a portion of the first fin-shapedpattern, wherein the first fin-shaped pattern comprises: a lower portionof the first fin-shaped pattern contacting the field insulating film; anupper portion of the first fin-shaped pattern not contacting the fieldinsulating film; a first boundary between the lower portion of the firstfin-shaped pattern and the upper portion of the first fin-shapedpattern; and a first fin center line perpendicular to the first boundaryand meeting the top of the upper portion of the first fin-shapedpattern; wherein the first sidewall of the upper portion of the firstfin-shaped pattern and the second sidewall of the upper portion of thefirst fin-shaped pattern are asymmetric with respect to the first fincenter line; wherein, in the upper portion of the first fin-shapedpattern having a first distance from the first boundary, a slope of thefirst sidewall is defined by a first slope, a slope of the secondsidewall is defined by a second slope, a width between the first fincenter line and the first sidewall is defined by a first width, and awidth between the first fin center line and the second sidewall isdefined by a second width; and wherein the first slope and the secondslope are different from each other, or the first width and the secondwidth are different from each other..
 33. The semiconductor device ofclaim 32: wherein the first sidewall includes a first inflection point,and the second sidewall includes a second inflection point; and whereina distance from the first boundary to the first inflection point isdifferent from a distance from the first boundary to the secondinflection point.
 34. The semiconductor device of claim 33, wherein thefirst inflection point and the second inflection point are located overan upper surface of the field insulating film.
 35. The semiconductordevice of claim 32, further comprising: a second fin-shaped patternincluding third and fourth sidewalls opposite one another and beingimmediately adjacent to the first fin-shaped pattern; a first trenchbetween the second sidewall of the first fin-shaped pattern and thethird sidewall of the second fin-shaped pattern, the second sidewall andthe third sidewall opposite one another; and a second trench adjacent tothe first sidewall of the first fin-shaped pattern and the fourthsidewall of the second fin-shaped pattern, wherein the field insulatingfilm fills at least a portion of the first trench and at least a portionof the second trench; wherein the second fin-shaped pattern comprises: alower portion of the second fin-shaped pattern contacting the fieldinsulating film; an upper portion of the second fin-shaped pattern notcontacting the field insulating film; a second boundary between thelower portion of the second fin-shaped pattern and the upper portion ofthe second fin-shaped pattern; and a second fin center lineperpendicular to the second boundary and meeting the top of the upperportion of the second fin-shaped pattern, and wherein the third sidewallof the upper portion of the second fin-shaped pattern and the fourthsidewall of the upper portion of the second fin-shaped pattern areasymmetric with respect to the second fin center line.
 36. Thesemiconductor device of claim 35: wherein the first trench defines thefirst fin-shaped pattern and the second fin-shaped pattern; wherein afirst depth of the first trench is smaller than a second depth of thesecond trench; wherein a field center line located away from the firstfin center line and the second fin center line by a same distance isdefined between the first fin center line and the second fin centerline; and wherein the second sidewall of the upper portion of the firstfin-shaped pattern and the third sidewall of the upper portion of thesecond fin-shaped pattern are symmetric with respect to the field centerline.
 37. The semiconductor device of claim 36: wherein the first trenchis on both sides of the second fin-shaped pattern; wherein thesemiconductor device further comprises a third fin-shaped patterndefined by the first trench and including fifth and sixth sidewallsopposite one another between the second fin-shaped pattern and thesecond trench; wherein the third fin-shaped pattern comprises: a lowerportion of the third fin-shaped pattern contacting the field insulatingfilm; an upper portion of the third fin-shaped pattern not contactingthe field insulating film; a third boundary between the lower portion ofthe third fin-shaped pattern and the upper portion of the thirdfin-shaped pattern; and a third fin center line perpendicular to thethird boundary and meeting the top of the upper portion of the thirdfin-shaped pattern; and wherein the fifth sidewall of the upper portionof the third fin-shaped pattern and the sixth sidewall of the upperportion of the third fin-shaped pattern are asymmetric with respect tothe third fin center line.
 38. The semiconductor device of claim 35:wherein a first depth of the first trench is equal to or smaller than asecond depth of the second trench; and wherein the first trench and thesecond trench define an active region.
 39. The semiconductor device ofclaim 32, further comprising: a second fin-shaped pattern comprisingthird and fourth sidewalls opposite one another, wherein the secondfin-shaped pattern comprises: a lower portion of the second fin-shapedpattern contacting the field insulating film; an upper portion of thesecond fin-shaped pattern not contacting the field insulating film; asecond boundary between the lower portion of the second fin-shapedpattern and the upper portion of the second fin-shaped pattern; and asecond fin center line perpendicular to the second boundary and meetingthe top of the upper portion of the second fin-shaped pattern; andwherein the third sidewall of the second fin-shaped pattern and thefourth sidewall of the second fin-shaped pattern are symmetric withrespect to the second fin center line.
 40. The semiconductor device ofclaim 32, further comprising a gate electrode crossing the firstfin-shaped pattern.